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    Dec 03, 2021  
2020-2021 Undergraduate Catalog 
2020-2021 Undergraduate Catalog [ARCHIVED CATALOG]

EEE 4274 - MEMS I: Chemical/Biomedical Sensors and Microfabrication

Credit(s): 3
The course gives an introduction to MEMS, microfabrication techniques and processes as well as basic design principles of biological and chemical Sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing.