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May 21, 2024
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2023-2024 Graduate Catalog
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EEE 6276 MEMS Microfabrication and Microsystems Technologies
Credit Hours: 3
Introduction to MEMS and microfabrication techniques and processes as well as basic design principles of MEMS sensors and actuators. The course concentrates on how MEMS devices and microsystems are microfabricated based on batch-production compatible semiconductor foundry process technologies and the fundamental operation principles of microsystems.
Prerequisite(s): None
Corequisite(s): None
Co-Prerequisite(s): None
USF College of Engineering | Department of Electrical Engineering
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