Nov 21, 2024  
2024-2025 Graduate Catalog 
    
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2024-2025 Graduate Catalog

EEE 6276 MEMS Microfabrication and Microsystems Technologies

Credit Hours: 3

Introduction to MEMS and microfabrication techniques and processes as well as basic design principles of MEMS sensors and actuators. The course concentrates on how MEMS devices and microsystems are microfabricated based on batch-production compatible semiconductor foundry process technologies and the fundamental operation principles of microsystems.

Prerequisite(s): None
Corequisite(s): None
Co-Prerequisite(s): None

USF College of Engineering | Department of Electrical Engineering